Michael Quinten's A Practical Guide to Optical Metrology for Thin Films PDF

By Michael Quinten

A one-stop, concise advisor on choosing and measuring skinny movie thickness by way of optical methods.

This sensible booklet covers the legislation of electromagnetic radiation and interplay of sunshine with subject, in addition to the idea and perform of thickness dimension, and glossy purposes. In so doing, it indicates the functions and possibilities of optical thickness selection and discusses the strengths and weaknesses of size units besides their assessment methods.

Following an creation to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in area and subject. the most subject of this e-book, the selection of the thickness of a layer in a layer stack via measuring the spectral reflectance or transmittance, is taken care of within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. eventually, in bankruptcy 7, the writer discusses a number of business functions of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive motion pictures, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at business and educational researchers, engineers, builders and brands excited about all components of optical layer and skinny optical movie dimension and metrology, approach keep an eye on, real-time tracking, and applications.

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